active spin coater ACT-300A II

Active
ACT-300AⅡ SPIN COATER

A spin coater (spin coating machine) is a spin coating device that creates a thin film using centrifugal force generated by placing a coating liquid on the top surface of a flat object to be coated and then rotating it at high speed.

Features

  • High performance and low cost, suitable for a wide range of applications from research to production
  • Safety cover with interlock sensor is standard
  • Safety cover has a drip hole (with slide cover) to allow dripping during rotation
  • Multi-stage, 10-step, 100-pattern program memory
  • Supports development and evaluation using various liquids
  • Compatible with automatic transfer robot (custom-made specifications)

    • Purpose

  • Semiconductors, solar cells, mobile, optical lenses, eyeglass lenses, nanotechnology and biotechnology, housing equipment, cutting-edge medical-related, LCD and other displays, experimentation, research and production to obtain coatings and thin films

    • Main destination

  • Small laboratories - Large companies, universities, and government agencies

    • Specifications

    Substrate size Φ5 to Φ150mm (Max. Φ6 inches, □110mm) Substrate support
    Weight of workpiece (substrate) Less than 300g
    Cup inner diameter Φ300mm
    Outer dimensions W350×D450×H Door closed 325(Door open 640)mm
    Power supply 1Φ 100V-10A (AC servo motor 200W) 50 / 60Hz
    Rotation control speed / Rotation accuracy 0 to 6000rpm / ±1rpm or less (under load)
    Substrate suction pressure -70 to -80kPa Vacuum pump displacement 12L/min min. or more.(Outer diameter Φ6 tube one-touch connection on the equipment side)
    Number of program steps/patterns 10 steps/100 patterns (program memory function standard) Changeable to 20 steps and 50 patterns (Specify at the time of order) Changeable to 50 steps and 20 patterns (Specify at the time of order)
    Display screen LCD display (20 characters and 4 lines) Recipe No., rotation speed, time, adsorption pressure display
    Control method Microcomputer control (easy programming with numeric keypad input)
    Main unit outer cover/cup material SUS304 Electropolished (Teflon coating available as an option)
    Safety measures Safety cover with interlock sensor (automatic rotation stops when cover is opened during rotation) Interlock function for substrate suction pressure (No rotation when not suctioned)
    Weight Approx. 22kg
    Standard delivery date after receiving an order Approx. 25 days (please confirm each time)